They systematically reviewed the current processing flows for SiC wafers, materials removing mechanisms, and processing systems, and delivered assistance on long term Instructions for SiC wafer processing. Skip to primary written content Thank you for going to nature.com. That you are employing a browser Edition with restricted support for CSS. https://www.facebook.com/permalink.php?story_fbid=pfbid0vuY47mVAJy6xu3SK1ZxACHZWQJconX3a8FZ1nP6MPCJj8jnt6HRFfFSx3j9vpWNpl&id=61560512640678&__cft__[0]=AZWxYZF78LtuBO4rXfMC4EMcvnNrboNKejseS0EokfSx3psaGlwOWqHkfZaZYlY_LUnQHyu-92TVzZi-xf0Eojwh5p6Xl3E4aFZYoflkdL0SjDe1Nu3KNaE2RLbdeSTZXykXXS2BV5I_hjUxtkcD6DSjNiOe74u2QEXBcuWbGwOXToVN14FshfRJJVrcpBM1Xz0fTvBGBAd4Al8KzL-fnVSs&__tn__=%2CO%2CP-R